Demonstration of Hetero Optomechanical Crystal Nanobeam Cavities with High Mechanical Frequency

摘要

Optomechanical crystal is a combination of both photonic and phononic crystal. It simultaneously confines light and mechanical motion and results in strong photon-phonon interaction, which provides a new approach to deplete phonons and realize on-chip quantum ground state. It is promising for both fundamental science and technological applications, such as mesoscopic quantum mechanics, sensing, transducing, and so on. Here high optomechanical coupling rate and efficiency are crucial, which dependents on the optical-mechanical mode-overlap and the mechanical frequency (phonon frequency), respectively. However, in the conventional optomechanical-crystal based on the same periodical structure, it is very difficult to obtain large optical-mechanical mode-overlap and high phonon frequency simultaneously. We proposed and demonstrated nanobeam cavities based on hetero optomechanical crystals with two types of periodic structure. The optical and mechanical modes can be separately confined by two types of periodic structures. Due to the design flexibility in the hetero structure, the optical field and the strain field can be designed to be concentrated inside the optomechanical cavities and resemble each other with an enhanced overlap, as well as high phonon frequency. A high optomechanical coupling rate of 1.3 MHz and a high phonon frequency of 5.9 GHz are predicted theoretically. The proposed cavities are fabricated as cantilevers on silicon-on-insulator chips. The measurement results indicate that a mechanical frequency as high as 5.66 GHz is obtained in ambient environment, which is the highest frequency demonstrated in one-dimensional optomechanical crystal structure.