A compact plasma pre-ionized TEA-CO_2 laser pulse clipper for material processing

摘要

An extra-laser cavity CO_2-TEA laser pulse clipper using gas breakdown techniques for high spatial resolution material processing and shallow material engraving and drilling processes is presented. Complete extinction of the nitrogen tail, that extends the pulse width, is obtained at pressures from 375 up to 1500 torr for nitrogen and argon gases. Excellent energy stability and pulse repeatability were further enhanced using high voltage assisted preionized plasma gas technique. Experimental data illustrates the direct correlation between laser pulse width and depth of engraving in aluminum and alumina materials.