The Numerical Simulation Research of Disk-type Molecular Pump Based on DSMC Method

摘要

First, the basic principle of the DSMC method is introduced, which include simulating process, calculating of collision and key technique about simulation. Then a detailed process of simulation analysis to Disk-type Molecular Pump's extraction process based on DSMC method, is described, such as establishing geometric model, meshing, selection of collision model, boundary simulation, etc. At last, the ongoing work is pointed out.