Precision machining of optical surfaces with small plasma jet tools

摘要

Atmospheric Ultra-Precision Plasma Jet Machining (UP-PJM) was used to modify fused silica, silicon and SiC with peak-to-valley (PV) accuracy in the nm range. As examples the processing of strongly curved SiC mirrors, a fine correction of a fused silica sample and a new deposition / transfer-technique for SiO_x are presented.