This work was carried out by taking into account that influence of platinum impurity on the properties of amorphous diamond-like carbon films are still poorly studied. In the present report optical properties of the amorphous diamond-like carbon films with platinum impurity (a-C:H ) are shown and discussed. The a-C:H films were deposited on quartz and silicon substrates. The films were fabricated by ion-plasma magnetron sputtering of combined polycrystalline graphite-platinum target. The process was carried out in hydrogen and argon gas mixture. The substrates temperature was held at 200o C and gas pressure in the chamber was kept at 1 Pa. The content of platinum impurity in the films was changed by alteration of platinum share in the combined target. Platinum content in the films was determinated by scanning electron microscope Quanta 200i 3D. The concentration of platinum in the films was varied from 0 to 10 at. %. Transmission electron microscopy (TEM) presents amorphousness of the films structure. Phase analysis of the surface was carried out with a usage of an atomic-force microscope (Integra Therma) and it was shown, that a-C:H films are two-phased and a-C:H films-three phased. Raman spectra of the a-C:H films was characterized for the a-C:H films.
展开▼
