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Retroreflector for Photonic Doppler Velocimetry

机译:光子多普勒速度的回荷光仪

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In order to meet the goals of the Department of Defense (DoD) for smaller and more accurate weapons, numerous projects are currently investigating the miniaturization of weapons and munition fuze components. One of these efforts is to characterize the performance of small detonators. The velocity of the flyer, the key component needed to initiate a detonation sequence, can be measured using a photonic Doppler velocimeter (PDV). The purpose of this research was to develop a microelectromechanical system (MEMS) device that would act as an optimal retroreflective surface for the PDV. Two MEMS solutions were explored: one using the Po1yMUMPs~(TM) fabrication process and one in-house fabrication design using silicon on insulator (SO1) wafers. The in-house design consisted of an array of corner reflectors created using an SOI wafer. Each corner reflector consisted of three separate mirror plates which were self-assembled by photoresist pad hinges. When heated to a critical temperature (typically 140-160°C), the photoresist pads melted and the resulting surface tension caused each mirror to rotate into place. The resulting array of corner reflectors was then coated with a thin layer of gold to increase reflectivity. Despite the successful assembly of a PolyMUMPsTM corner reflector, assembling an array of these reflectors was found to be unfeasible. Although the SOI corner reflector design was completed, these devices were not fabricated in time for testing during this research. However, the bidirectional reflectance distribution function (BRDF) and optical cross section (OCS) of commercially available retroreflective tapes were measured. These results can be used as a baseline comparison for future testing of a fabricated SOI corner reflector array.
机译:为了满足国防部(DoD)的更小和更精确的武器的目标,许多项目目前正在调查的武器弹药和引信组件小型化。其中一个努力是表征小型雷管的性能。传单的速度,启动爆轰序列所需的关键部件可以使用光子多普勒速度计(PDV)来测量。该研究的目的是开发一种微机电系统(MEMS)装置,该装置将充当PDV的最佳逆向反射表面。探索了两个MEMS解决方案:使用PO1YMUMPS〜(TM)制造工艺和一种在绝缘体上的硅(SO1)晶片上的一个内部制造设计。内部设计包括使用SOI晶片创建的一系列角反射器。每个拐角反射器由三个独立的镜板组成,由光刻胶垫铰链自组装。当加热到临界温度(通常为140-160℃)时,光致抗蚀剂焊盘熔化并且所得到的表面张力使得每个镜子旋转到位。然后将所得到的拐角反射器阵列涂有薄的金层以增加反射率。尽管成功地组装了Polymumpstm角反射器,但是组装了这些反射器的数组是不可行的。虽然SOI角反射器设计完成,但这些器件在本研究期间没有及时制造用于测试。然而,测量市售逆向反射胶带的双向反射率分布函数(BRDF)和光学横截面(OCS)。这些结果可以用作用于未来测试制造的SOI角反射器阵列的基线比较。

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