Silicon ... Beyond Silicon:Beginning of the End or End of the Beginning?

摘要

In the early 1960's, at the beginning of the electronics revolution, silicon integratedcircuits built their current dominance fundamentally and pervasively on tailor-made materials, starting at the atomic level. Early development in thin-filmdeposition techniques, particularly chemical vapor deposition (CVD) andmolecular beam epitaxy, led the way to accurate control over material constituentsin "atomic amounts," in order to form the active part of high-performance devices.