NANO/MICRO MACHINING USING MULTI-ARRAYED TOOL FOR NANO/MICRO SURFACE PATTERNING

摘要

Various surface areas with nano/microscale patterns or shapes may exhibit phenomena such as the lotus effect. A considerable amount of research has been conducted to find practical applications of such phenomena. In order to apply a pattern, it is necessary to develop technologies for measuring the natural objects and analyzing the measured phenomena, as well as for the design and fabrication of the pattern itself. Figure 1 shows typical pattern for analysis of superhydrophobic [1]. Also, Silk et al. [2] studied the impact of structured surfaces on spray cooling and demonstrated that enhanced surfaces provide larger heat transfer relative to smooth surfaces. They examined three geometries structured with cubic pin fins, pyramids and straight fins (Figure 2) made of oxygen-free high conductivity copper and used Fluorinert PF-5060 as the working fluid. These patterns are general pattern for smart surface.