The Effect of Plasma Surface Treatment on the Permeability and Adhesion of Laminated Green Ceramic Tapes

摘要

The plasma surface treatment of green ceramic tapes has been examined for tapes containing barium titanate as the dielectric and poly(vinyl butyral) and dioctyl phthalate organic additives. After plasma surface treatment, the tapes were laminated together at elevated temperature. The permeability and adhesion strength of the laminated tapes was then measured. Surface treatment with argon plasma leads to decreased adhesion strength and no change in the permeability. Surface treatment with oxygen plasma can lead to enhanced adhesion strength without drastically reducing the permeability.