CCD / CMOS Hybrid FPA for Low Light Level Imaging

摘要

We present a CCD / CMOS hybrid focal plane array (FPA) for low light level imaging applications. The hybrid approach combines the best of CCD imaging characteristics (e.g. high quantum efficiency, low dark current, excellent uniformity, and low pixel cross talk) with the high speed, low power and ultra-low read noise of CMOS readout technology. The FPA is comprised of two CMOS readout integrated circuits (ROIC) that are bump bonded to a CCD imaging substrate. Each ROIC is an array of Capacitive Transimpedence Amplifiers (CTIA) that connect to the CCD columns via indium bumps. The proposed column parallel readout architecture eliminates the slow speed, high noise, and high power limitations of a conventional CCD. This results in a compact, low power, ultra-sensitive solid-state FPA that can be used in low light level applications such as live-cell microscopy and security cameras at room temperature operation. The prototype FPA has a 1280 x 1024 format with 12-um square pixels. Measured dark current is less than 5.8 pA/cm~2 at room temperature and the overall read noise is as low as 2.9e at 30 frames/sec.