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SIM PlanetQuest Precision White Light Interferometry

机译:SIM PlanetQuest精密白色光干涉测量

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摘要

Precision white light interferometry performed at the picometer class level is an extremely challenging endeavor,. Over the past several years a combination of analysis, experiment, and reconciliation of the two has yielded continued improvements and refinements of the process to bring this technology to fruition,. This paper provides an overview of several of the refinements of the interference models and algorithms developed for calibration and fringe estimation that have evolved over this period.
机译:在皮肤仪阶级执行的精密白色光干涉测量是一个非常具有挑战性的努力。在过去几年中,两者的分析,实验和和解的结合已经持续改进和改进的过程,使这项技术成为果实,。本文概述了用于在此期间发展的校准和边缘估计开发的干扰模型和算法的几个改进概述。

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