Development of a Silicon Microneedle with Three-Dimensional Sharp Tip by Electrochemical Etching

摘要

Aiming at the use in low-invasive medical treatments, this paper reports a fabrication of silicon microneedle with three-dimensional sharp tip. The authors have already confirmed by both finite element method (FEM) simulation and experiment that the stress concentration becomes more severe as the needle's tip becomes sharper, which makes the necessary force for inserting the needle lower. Following this, the electrochemical etching technique using hydrofluoric acid (HF) solution is employed for sharpening the tip of a pillar, which is diced from a silicon wafer.