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Genetic algorithm optimization of X-ray multilayer coatings

机译:X射线多层涂层的遗传算法优化

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A simple genetic algorithm for global optimisation of the reflectivity of multilayer coatings in the extreme ultra-violet and X-ray wavelength ranges has been implemented as a software tool. The genetic algorithm identifies the best-performing multilayer among a population of solutions that evolves while random mutations are applied to the thickness of the layers. The tool is designed for maximising the reflectivity either over a wavelength range at fixed incident angle or over a range of incident directions at fixed energy. The algorithm has been preliminarily tested on two specific applications: a Pt/C multilayer for hard X-rays applications in astrophysics and cosmology and a Mo/Si coating prominent to next generation lithography at 13.5 nm. The results of the analyses are compared to the performances achievable with periodic multilayers and traditional supermirrors.
机译:一种简单的遗传算法,用于全局优化的多层涂层在极端超紫色和X射线波长范围内的多层涂层的反射率已经实现为软件工具。遗传算法识别在将随机突变施加到层的厚度时演进的解决方案中最佳性能的多层。该工具被设计用于在固定入射角或在固定能量的一系列入射方向上最大化在波长范围内的反射率。该算法已经在两种特定应用中进行了预先测试:用于天体物理学和宇宙中的硬X射线应用的PT / C多层,以及在13.5nm的下一代光刻突出的MO / Si涂层。将分析结果与定期多层和传统超级磨料的性能进行比较。

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