MEM-mirror design and analysis for tunable optical filters

摘要

In this paper, we will show modeling of MEM-mirrors for tunable optical filters and present the simulation results using ConventorWare software. The gold-plated micro-mirror is placed on InP/Air pair structure separated by air-gap. A voltage induced electrostatic force displaces the micro-mirror. Very wide tuning range of 149 nm is observed for InP/air-gap filters at low actuation voltage of 2.5V. To carry out optical simulation we developed a JAVA program that characterizes the reflectance spectra and the tuning behavior. These mirror designs can be utilized for optical communication and sensing applications in tunable optical filters.