Finite element analysis of the substrate thickness effect on travelling leaky surface acoustic waves

摘要

A FE method is developed for analysis of travelling LSAWs. Because of the use of the general eigenvalue problem with Hermitian coefficient matrices needs to be solved. A publicly available eigenvalue solver ARPACK, together with the shift and invert spectral transformation, is used to solve the problem efficiently. The effect of the finite thickness of substrates on the dispersion behaviour of LSAWs is simulated.