Better Facility Design from a Better Understanding of Tool Utility Requirements

摘要

This paper is targeted at process services designers and the tool manufacturers. The process services are defined as those utilities that connect directly to the tools and equipment in and around a semiconductor manufacturing facility. Although not a process service this paper also covers electrical supplies. Good process service design relies fully on the process information provided by the manufacturers and this paper identifies the information the manufacturers should be providing. The importance of this information and its completeness cannot be understated. This paper also provides advice to the process designer on how to work with the data provided by the manufacturers and where it is necessary to seek out further information. This paper also covers the issues of how to collate the information from all the suppliers, the typical misunderstandings on units of measurement and their conversion, and when and how to apply diversity in the design.