Today's microsystems (MEMS) are mostly characterized by high reliable but cost intensive processes. The base material used for MEMS elements is very often silicon with its well known characteristics but also with its costly production steps. Therefore, many good ideas for interesting products cannot be realized because of high development and production costs and small number of units. For a broader application of MEMS elements, new materials and easier techniques are required. In following sections, we will show some new concepts, which offer the possibility for low cost production.
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