This paper presents a miniaturized fast tool servo (Mini-FTS), which consists of a piezoelectric actuator and a displacement sensor, for generating three-dimensional micro-structures on large area surfaces. A small hollow-type piezoelectric ring actuator with an internally pre-stressed stainless casing is employed to actuate the diamond tool. A compact capacitance-type displacement sensor for monitoring the displacement of the actuator is mounted inside the ring actuator so that the FTS has almost the same size as the ring actuator, which is Φ35mm × 34 mm. Fabrication experiments of a sinusoidal micro-structured metrology surface on a cylinder have also been carried out.
展开▼
