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Continuously tunable air-gap micro-cavity devices for optical communication systems

机译:用于光通信系统的连续可调谐的气隙微腔装置

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We present ultra-widely tunable micro-cavity devices realized by micro-opto-electro-mechanical system (MOEMS) technology. We modeled, fabricated and characterized 1.55μm micromachined optical filter and VCSEL devices capable of wide, monotonic and kink-free tuning by a single control parameter, Our vertical cavity devices comprise single or multiple horizontal air-gaps in the dielectric and InP-based material system. Distributed Bragg mirrors with multiple air-gaps are implemented. Due to the high refractive index contrast between air (n=1) and InP (n=3.17) only 3 periods are sufficient to guarantee a reflectivity exceeding 99.8% and offer an enormous stop-band width exceeding 500nm. Unlike InGaAsP/InP or dielectric mirrors they ensure short penetration depth of the optical intensity field in the fabrication of MOEMS devices. By controlling the stress we are able to fabricate InP membranes which are extremely thin (357nm thickness) and at the same time flat (radius of curvature above 5mm). Micromechanical single parametric actuation is achieved by both, thermal and electrostatic actuation. Filter devices with a record tuning over 127nm with 7.3V are presented.
机译:我们介绍了通过微光电机械系统(MOEMS)技术实现的超广泛可调谐的微腔器件。我们通过单个控制参数建模,制造和特征1.55μm微机械的光学滤光器和VCSEL装置,其能够通过单个控制参数进行宽,单调和无扭结的调谐,我们的垂直腔装置包括在电介质和基于INP的材料中的单个或多个水平空气间隙系统。实现了具有多个空气间隙的分布式布拉格镜。由于空气(n = 1)和INP(n = 3.17)之间的高折射率对比度,仅3个时段可以保证超过99.8%的反射率并且提供超过500nm的巨大止动带宽度。与InGaASP / INP或介电镜不同,它们确保了MOEMS器件的制造中的光学强度场的短渗透深度。通过控制应力,我们能够制造极薄(357nm厚度)的INP膜,同时平坦(曲率高于5mm)。微机械单个参数致动由热和静电致动实现。提出了具有7.3V超过127nm的记录调谐的过滤器件。

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