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Net Processing Equipment for Deposition of ARAS Coatings on CRT

机译:用于沉积ARAS涂层的净处理设备

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摘要

The paper describes industrial equipement for vacuum deposition of ARAS coatings on CRT. Deposition process is performed individually for each CRT tube with positioning of only front panel of the CRT in vacuum chamber and use of mobile scanning system with ion beam cleaning and ion sputtering sources. Operation system of described equipment provides automated functioning of groups of such equipment within integrated technological lines with CRT robot handling systems.
机译:本文介绍了在CRT上真空沉积真空沉积的工业设备。对于每个CRT管,单独地执行沉积工艺,其具有在真空室中仅具有CRT的前面板的定位,以及使用具有离子束清洁和离子溅射源的移动扫描系统。所述设备的操作系统提供了在具有CRT机器人处理系统的综合技术线内的这种设备组的自动运作。

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