Reverse Error Separation Method for the Position Error between References During the Measurement of Cylindricity

摘要

"Position error (or called the parallelism error) between references" is a key to restrict high measuring accuracy in cylintricity measurement. References refer to rotational reference and linear motion reference of the cylindricity measuring instrument. In order to eliminate the position error, a method that can measure the position error between references on the any height position, based on the reverse error separation technique and the spline interpolation technique, is developed. Moreover, a illustrating analysis method for judging tilting direction and tilting magnitude is presented. The experiments show that the method can eliminate effectively the position error between the references in cylindricity measurement and raise measuring accuracy of cylindricity to sub-nanometer level.