Gas phase analysis of TiCl{sub}4 and NH{sub}3 plasma processes by molecular beam mass spectrometry

摘要

Molecular beam mass spectrometry (MBMS) has been used to analyze the gas phase of Ar, Ar+TiCl{sub}4 and NH{sub}3 plasmas. The gas phase composition was analyzed as a function of pressure and plasma power. The results show that an increase in plasma power increases the concentration of dissociated and ionized species in the plasma phase. Higher plasma power increased the intensity of ions from TiCl{sub}4 and Ar up until 100 W and then ion intensity starts to level off with increasing rf power to case of NH{sub}3 plasma, N{sup}+ ion intensity increased until 20 W plasma power reaching a plateau. The Ar ion intensity increases with total reactor pressure up to 26.66 Pa (200 mTorr) and then ion intensity was found to decrease with pressure. The ion intensity of NH{sub}3 plasma increased with total reactor pressure until 66.65 Pa (500 mTorr).