IMPLICATIONS OF IN-PLANE STRETCH AND THICKNESS COMPRESSION COUPLED TO FLEXURE ON THE LOWER BOUND OF BAW ACCELERATION SENSITIVITY

摘要

It is known that the acceleration-induced frequency shift vanishes for an ideal, symmetrically mounted bulk acoustic wave resonator subjected to certain types of deformations. We show here that the acceleration-induced frequency shift does not vanish and is not insignificant for certain deformations previously unconsidered.