Research for wide range and high resolution displacement measurement with grating

摘要

A new method of displacement measurement using single grating is put forward in the paper. Wide range and high-resolution displacement measurement is realized by means of a general coarse metric-grating and a spectroscope. The method solves the traditional problem that high frequency grating can't be manufactured too long. The optical configuration and the principle of measurement are presented in the paper. Its feasibility is proved by experiment. In the experiment, a metric-grating with frequency of 50 rulings/mm is used and optical subdivision more than 32 is received.