Optimising the STEM performance of the JEOL 2010F 200kV FEGTEM

摘要

The experimental techniques of Z-contrast imaging and electron energy-loss spectroscopy can yield a wealth of information on the atomic and electronic structures of defects and interfaces. The spatial resolution of these techniques depends on the size and stability of the electron probe. Here we demonstrate the characterisation and optimisation of small probe performance in the 200 kV FEGTEM, equipped with a Schottky field-emission electron source. Probe sizes of around 1.5 A are obtained.