Attempt of Spray Pyrolysis Deposition of Various Semiconducting Thin Films for Solar Cells

摘要

The preparation of semiconducting thin films for solar cells has been attempted on glass substrates by means of a spray-pyrolysis deposition (SPD) technique using a simple apparatus with good productivity. Aqueous solutions, including copper(II) acetate with glucost and tin(II) chloride with thiourea as sprayed soltions, were used for cuprous oxide and tin sulfide thin films, respectively. An unknownphase thin film was obtained under the specific conditions of both the solution concentration and deposition temperature from the same starting solution for SnS thin film. The unknown phase was identified as a novel compound of tin oxysulfide (Sn2OS) with a cubic crystal lattice. Furthermore, copper indium disulfide (CuInS2) thin films were successfully prepared from water-ethanol (1:1 in volume) solutions including copper acetate, indium acetylacetonate, and thiourea.