Raman spectroscopy of amorphous diamond films prepared by ArF laser ablation as a function of carbon species

摘要

Amorphous carbon films were prepared by ArF (193 nm) pulsed laser deposition. Raman spectroscopy was employed to study the changes in the bonding of the carbon films as a function of the pulsed laser generated carbon plum, which was measured using optical transmittance diagnosis technique. The measurement and calculation reveal that the pulsed laser generated carbon plum contains two different part species. The center-of-mass velocity of the fast part is about 12000 m/s and the center-of-mass velocity of the slow part is about 50 m/s. The film correspond to the central part of the carbon plum with the most diamond-like properties is deposited by the fast part of the carbon species. Meanwhile, the film correspond to the outer part of the plum with lower fraction sp$+3$/-bonds is deposited by the slow part of the carbon species.