Direct-write microcutting and micropatterning of polymers using high prf UV copper lasers

摘要

Phenomenal market growth is predicted for laser micromachining applications in the next decade as microelectronic and medical industries begin to rely on microprocessing as a critical manufacturing process. In this paper we discuss techniques used for micropattterning by direct write machining, presenting how the groove quality and depth are effected by source fluence and sample speed for both highly and poorly absorbing polymers.