Characterization of a MEMS-fabricated mixing device

摘要

This paper discusses the fabrication and the characterization of a MEMS-based micromixer. Active perturbations provided by a pressure source/sink system are used to enhance the mixing betwen two fluid streams. From our preliminary test, it appears that an effective mixing is possible through the generation of chaotic-like distortions at the interface between two streams. A numerical simulation based on a kinematical model reveals a similar behavior under the same condition.