Measurement of surface shape and deformation by phase-shiftng image digital holography

摘要

Measurement of shape and deformation of diffusely reflecting surfaces by phase-shifting digital holography is presented that uses an imaging setup. The difference of the reconstructed phases before and after tilt of the object illumination beam provides the contour lines of the surface height, while that before and after object deformation delivers those of object displacement. This method enables measurements of both surface shape and deformation of 3-dimensional object of various sizes with the same optical system and the processing software. Suppression of speckle noise is also discussed.