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Multiwavelength interferometer for high accuracy measurement of long gauge blocks

机译:多波长干涉仪,用于高压测量块的高精度测量

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In the paper the multiwavelength interferometer with automatic data analysis based on phase fraction method is described. It is used to extend measurement range without losing sensitivity, especially to calibrate long gauge blocks. Numerical simulations and experimental work results have been shown to confirm proper functioning of this method. However, stabilization of environmental conditions and light sources has significant influence on correctness of measurement results. To match those requirements measurement system, which will be built for Polish Central Office of Measures, has been designed. This design is based on Twyman- Green interferometer and assumes usage of two highly stabilized laser sources. Optical and mechanical design of this system has been shown. Moreover, system for monitoring and stabilization of environmental conditions is required.
机译:在纸质中,描述了基于相位分数法的自动数据分析的多波长干涉仪。它用于延长测量范围而不减少灵敏度,尤其是校准长量表块。已经显示了数值模拟和实验性工作结果确认了这种方法的正常功能。然而,环境条件和光源的稳定对测量结果的正确性具有显着影响。为了匹配这些要求,设计了测量系统,该系统将被设计为波兰中央措施,已经设计。该设计基于Twyman-绿色干涉仪,并假设使用两个高度稳定的激光源。已显示该系统的光学和机械设计。此外,需要进行监测和稳定环境条件的系统。

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