Measurement of Focal Plane for Microlens Array using Metallographic Microscope

摘要

Twice-image method based on the Newton's formula, is used to measure the focal plane of the microlens array. The focal plane of the microlens array is measured by using the transmitted optical path, magnification, and high definition of the CCD camera of a metallographic microscope. Both the experimental setup and procedures are described in detail in the paper. Experimental results are also discussed thoroughly as well. It is a simple, convenient and economical method for checking the focal plane of a microlens array efficiently.