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Simultaneous determination of thickness and refractive indices of birefringent wafer by simple transmission measurement

机译:通过简单的传输测量同时测定双折射晶片的厚度和折射率

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We demonstrate a method for determining the principal indices of refraction and the thickness of a birefringent wafer. Simply, the light transmittance was measured while rotating the wafer. The directly transmitted beam makes interference with those multiply reflected between the surfaces as in a Fabry-Perot etalon, producing an interferogram as a function of angle of incidence. We applied this method to a LiNbO_3 wafer, determining the absolute values of ordinary and extraordinary indices with an uncertainty of 10~(-5). In addition to the measurement accuracy, the major advantages of our method are extreme simplicity and environmental robustness in the experiment.
机译:我们证明了一种确定折射的主要指标和双折射晶片的厚度的方法。简单地,在旋转晶片的同时测量透光率。直接透射光束使得干扰与在法布里 - 珀罗标准具中的表面之间乘以反射的那些,产生作为入射角的函数的干扰图。我们将这种方法应用于Linbo_3晶圆,确定普通和非凡指数的绝对值,不确定为10〜( - 5)。除了测量精度之外,我们的方法的主要优点是实验中的极端简单和环境鲁棒性。

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