Small pitch fringe projection method with multiple linear fiber arrays for 3D shape measurement

摘要

3-D shape measurement systems by contactless method are required in the quality inspections of metal molds and electronic parts in industrial fields. A grating projection method with phase-shifting method has advantages of high precision and high speed. Recently, the size of a BGA (ball grid array) becomes smaller. So the pitch of a grating pattern projected onto the specimen should be smaller. In conventional method, fringe pattern is projected using an imaging lens. The focal depth becomes smaller in the case of reduced projection. It is therefore difficult to project a grating pattern with small pitch onto an object with large incident angles. Authors recently proposed a light source stepping method using a linear LED device. It is easy to shrink the projected grating pitch with a lens because this projection method does not use an imaging lens. The pitch of the projected grating depends on the width of the light source. There is a limit to shrink the projected grating pitch according to the size of the LED chip. In this paper, a small pitch fringe projection method with multiple linear fiber arrays for 3D shape measurement is proposed. The width of the fiber array is 30μm. It is one digit smaller than the width of the LED chip. The experimental result of 3-D shape measurement with small pitch projection with large incident angles is shown.