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Analysis of optical Monitoring Strategies for narrow bandpass Filters by Software Simulation

机译:软件仿真对窄带滤波器的光学监测策略分析

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Narrow bandpass filters have historically been optically monitored at the central wavelength of the passband on a deliverable substrate by terminating each layer at a turning point. This has been shown to have error compensating effects which make possible resulting performance which could not otherwise be achieved. Another strategy has been proposed wherein the ratio of the thickness of the high and low index layers of each layer pair, which normally total one half-wave of optical thickness, is changed from 1:1 to a somewhat different ratio while maintaining the one half-wave total layer pair thickness. The spectral details of the modified design differ little from the classic design; those differences are in proportion to the difference of the ratio from the usual 1:1. This can create a situation where there are two turning points within one of the layers and none in the other layer of the pair, and the layer terminations are suitably placed just after turning points. These termination conditions provide an opportunity for greater accuracy and reproducibility in the layer thicknesses. The simulation capabilities of optical monitor software have been used to compare the results of this strategy with that of the classical turning point method in the presence of random noise in the optical and crystal signals.
机译:通过在转折点处终止每个层,历史上已经在销售基板的中央波长上历史上被光学监测了窄带通滤波器。这已被证明具有误差补偿效果,这使得可能导致的性能无法否则。已经提出了另一种策略,其中每个层对的高和低指数层的厚度与通常总光厚度的一系列半波的比率从1:1变为稍微不同的比率,同时保持一半 - 从总层对厚度。改进设计的光谱细节从经典设计中略有不同;这些差异与惯常1:1的比例的差异成比例。这可以创建一种情况,其中在该对的另一层中的一个层内部和没有两个转动点,并且层终端适当地放置在转弯点之后。这些终端条件提供了更大的准确性和层厚度的机会。光学监视器软件的仿真能力已被用于将该策略的结果与典型转向点法的存在结果与光学和晶体信号中的随机噪声的存在进行比较。

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