A THz-TDS imaging system has been newly designed. It covers a wide frequency range between 0.1 and 7 THz by using a DAST crystal as a THz-wave source. Since a delay stage slides at high speed with a high degree of accuracy, the waveform is reproducible. The data processing is efficient with the data acquisition at 100 MHz. A spectroscopic image of 20 × 20 pixels can be obtained in approximately 3 min with the resolution of 15 GHz.
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