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Electrodeposition of Crystalline Silicon Films from Alkali Fluoride Mixtures

机译:从碱氟化物混合物中电沉积晶体硅膜

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The objective of this work was to study the electrodeposition of silicon in molten KF-LiF (eut)-K_2SiF_6 (5 mol%) on Ag and Si substrates at 550 °C and 800°C. In addition electrochemical studies of the system were performed on silver, tungsten and glassy carbon substrates at 800°C. The electrochemical measurements confirmed that the reduction of Si is diffusion controlled and occurs in two steps. On silver, dense, coherent films with good adhesion and no inclusions of salt were obtained at 800°C at the growth rate 52 μm/hour. On silicon, the microstructure seemed to consist of small "randomly" oriented crystals. At 550 °C, the deposit became porous and powderish both on silver and silicon substrates. The low temperature combined with the relatively high current densities applied was believed to hinder crystal growth.
机译:这项工作的目的是研究熔融KF-LIF(EUT)-K_2SIF_6(5mol%)在550℃和800℃的Si底物上的硅的电沉积。此外,该系统的电化学研究在800℃下对银,钨和玻璃碳基材进行。电化学测量证实,Si的还原是扩散控制并以两步发生。在粘附性良好的银,致密,相干薄膜上,在800℃下在生长速率下在800℃下获得含盐的夹杂物。在硅上,微观结构似乎由小的“随机”定向晶体组成。在550°C时,沉积物在银和硅基材上变得多孔和粉状。据信,低温结合应用的相对高的电流密度妨碍晶体生长。

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