Advanced ceramics are primarily used in adverse environments and applications, due to their high hardness, remarkable corrosion resistance, low thermal expansion, high thermal shock resistance and low weight. Representatives are silicon nitride balls in bearing components and silicon carbide mirrors for astronomical optics devices. Furthermore, these non-oxide ceramics can be used by mold manufacturers for molding complex optics components out of glass. In order to obtain the low roughness requirements of the optical systems, a defect free surface and an accurate form is indispensable. Despite diverse scientific investigations and developments, today’s process strategies for computer controlled polishing [1, 2, 3] are still insufficient. The high amount of time and effort needed for the design of robust strategies, especially for small samples and free formed geometries turn out as the biggest deficits.
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