Self-lubricating composite coating on air foil bearing shaft by Hollow Cathode Plasma Jet

摘要

The self-lubricating composite films were deposited on Inconel 718 by Hollow Cathode Plasma Jet (HCPJ). These composite materials consist of chrome nickel alloy matrix and Ag, BaF_2/CaF_2 solid lubricants. The Cr_2O_3-NiCr-Ag composite thin film was crystallized and had the main peaks of Cr_2O_3 (012) and Ag (111). The deposition rate of 200 nm /min by HCPJ was much faster than the ordinary R.F planar magnetron sputtering. The surface roughness of coated shaft was 30 nm.