The NEWater produced by treating the secondary effluent using proven dual membrane technology has been supplied for more than two years now to the commercial customers. Most of the this water is consumed by the wafer fabs for production of UPW grade water for their process. Chartered Semiconductor is one of the water fabs which use this water as feed water to UPW plant. The details of the pilot study which was conducted by CAWT were discussed at the 21st SPWCC conference in 2002. There was a gradual introduction of NEWater when the switchover began two years ago. The paper discusses the precautions taken during this changeover, observations made during the changeover and current results. The benchmarked profiles of TOC, Residual Ionic Impurities, Dissolved Oxygen and Particle Count Levels of UPW produced from NEWater as feed source against potable water is being discussed.
展开▼
