Benefits of APC at Infineon Application examples from production Fab Villach

摘要

APC (Advanced Process Control) has gained increasing attention over the past few years. It is supposed that it is a key for the success in increasing process stability/yield & productivity/costs. The paper gives a definition of the APC disciplines Fault Detection and Classification (FDC), Sensor Systems & Run-to-Run Control (R2R). It highlights the APC history & organization at infineon, & status of implementation at Infineon's fab Villach, the application of APC in different process areas, examples of achieved benefits, and give an outlook for future requirements.