Electrical Characteristics of Inductively Coupled Plasma Using Single Langmuir Probe

摘要

High frequency discharges include capacitively coupled and inductively coupled discharges. Inductively coupled plasma'11 is generated by electromagnetic coupling between a high frequency source and plasma through an antenna coil. When a large high frequency current flow through a circuit, magnetic field is generated and such magnetic field is applied to the plasma and corresponding electric field is generated by Faraday law. Such a phenomenon has been used to develop high efficiency and long life electrodeless lamp. Since the electrodeless lamp does not have filaments or electrodes that are deteriorated over time, it is possible to achieve long lamp life . Electrical and optical characteristics of the electrodeless lamp strongly depend on types and pressures of filled gases. However, investigation on such issues has drawn less attention and to our knowledge'31, optimal gas pressure for different RF (radio frequency) power has not been reported. In inductively coupled plasma, high density plasma can be achieved even in relatively low gas pressures.