Design of Microscope Apparatus with Matrix CCD for Inspecting Semiconductor Chips

摘要

The measurement for micro objects is always an important subject in industry production and scientific research. We have done some research works on the measurement with microscope, and designed this apparatus for the semiconductor industry, by combining the CCD (Charge Coupled Devices) technique and the image processing ability of computer. The designing of optical system and several experiments of calibrating the system are presented in this paper. This apparatus is of great importance to the manufacturing and inspection of semiconductor chips.