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Improvement of Self-Micrometer Laser Through Employing CCP

机译:通过采用CCP改进自微米计激光器

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The displacement self-sensing laser of λ/8 resolution was previously reported, without nonlinear error on principle, and with the function of self-calibration. In this paper, we report out new result: a cube corner prism (CCP) is used for the first time to realize the folding-cavity He-Ne laser; using this technology, we made two important improvements: one is to enhance the robust of the laser, especially the stability of the laser power when one of the cavity mirrors of laser is moved by the object to be measured and thus expanded the measurement range, the other is to increase the potential resolution up to λ/16.In current demonstration, the laser has large cavity length changeable range (60mm) and high potential measurement accuracy of λ/16 (0.040μm for He-Ne laser). This method has prospective benefits to be applied in displacement measurement of high resolution.
机译:先前报道了λ/ 8分辨率的位移自感应激光器,没有原则上的非线性误差,并且具有自校准的功能。在本文中,我们报告了新的结果:第一次使用立方体角棱镜(CCP)来实现折叠腔HE-NE激光;使用这项技术,我们制作了两个重要的改进:一个是提高激光器的稳健,特别是当激光器的一个腔体镜子移动的腔体镜头移动并因此扩展测量范围时,激光功率的稳定性。另一个是将潜在的分辨率提高到λ/ 16.在当前演示中,激光具有大的腔体长度可变范围(60mm)和λ/ 16的高电位测量精度(用于HE-NE激光0.040μm)。该方法具有在高分辨率的位移测量中应用的前瞻性益处。

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