IEDF Measurements in a Confined Hydrogen CCRF Discharge

摘要

Hydrogen plasma physics and chemistry are studied in a capacitively coupled rf (CCRF) plasma system equipped with a quadrupole mass spectrometer. The discharge is confined between two parallel plates using a quartz tube. Due to the symmetry of the discharge the sheath voltage in front of the grounded electrode is large (> 100V). The ion energy distribution function (IEDF), for ions traversing the sheath, is dependent on the sheath characteristics. As expected, the H_(2)~(+) IEDF is influenced by charge-exchange collisions. However, this is not the case for the H~(+) and H_(3)~(+) spectra. Results can be compared to a 2D particle-in-cell (PIC) simulation code suitably coupled with a global model code [1].