Latest developments in Biochemistry such as Genomics and Proteomics require highly sensitive and selective transducers that obtain a measurement signal from tiny probe volumes. Quartz Crystal Microbalance (QCM) is an established method for analyte measurement in liquids or probing interfacial phenomena. The combination of photolithographic and etching processes offers a new promising approach for manufacturing quartz crystal arrays with higher sensitivity due to higher resonant frequencies f_0 and smaller crystal diameters which is a prerequisite for biochemical sensing. Such Miniaturised QCM arrays were designed, fabricated and tested.
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