3D-microstructuring of Pyrex glass for the manufacturing of hybrid microsystems by laser processing

摘要

Laser induced backside wet etching (LIBWE), laser ablation with excimer lasers and laser chemical vapour deposition (LCVD) are flexible and precise laser processing methods for microstructuring of Pyrex glass. Different laser machined examples for applications in microsystem technology are presented and an outlook upon further possibilities is given.