The application of three-intensity measurement technique in ellipsometry

机译：三强测量技术在椭圆形测量中的应用

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A three-intensity technique is applied in ellipsometry for measuring the ellipsometric parameters of a polymer thin film surface. In addition to the thickness of polymer film, the regions of pure substrate, intermediate and polymer are studied separately.

机译：在椭圆形测定中施加三强度技术，用于测量聚合物薄膜表面的椭圆参数。除了聚合物膜的厚度之外，纯基质的区域，中间体和聚合物分别研究。

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《Pacific Rim Conference on Lasers and Electro-Optics》|2003年||共1页
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Lee K.Y.; Chen C.J.; Chao Y.F.;
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中图分类 TN2-53;
关键词
ellipsometry; polymer films; optical films; thickness measurement; optical polymers; three-intensity measurement technique; ellipsometry; three-intensity technique; ellipsometric parameters measurement; polymer thin film surface; polymer film; pure substrate; nondestructive measurement;

机译：椭圆偏振;聚合物膜;光学膜;厚度测量;光聚合物;三强度测量技术;椭圆光度法;三强度技术;椭圆参数测量;高分子薄膜表面上;聚合物膜;纯基板;无损测量;

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专利

1. A three-intensity technique for polarizer-sample-analyser photometric ellipsometry and polarimetry [J] . Chao YF., Hung CS., Lin JJ., Journal of Physics, D. Applied Physics: A Europhysics Journal . 1998,第16期

机译：偏振器-样品分析仪的光度椭圆和偏光的三强度技术
2. Three-intensity measurement technique and its measurement in elliptical retarder [J] . P.L. Lin, C.Y. Han, Y.F. Chao Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2008,第13期

机译：椭圆缓速器的三强度测量技术及其测量
3. Protein microarray biosensors based on imaging ellipsometry techniques and their applications [J] . Yu Niu, Gang Jin Protein & Cell . 2011,第6期

机译：基于成像椭圆仪技术的蛋白质微阵列生物传感器及其应用
4. The application of three-intensity measurement technique in ellipsometry [C] . Lee, K.Y., Chen, . 2003

机译：三强度测量技术在椭偏仪中的应用
5. Design, development, and applications of image scanning ellipsometry for the measurement of thin film thickness profiles. [D] . Liu, An-Hong. 1994

机译：图像扫描椭圆仪的设计，开发和应用，用于测量薄膜厚度轮廓。
6. Protein microarray biosensors based on imaging ellipsometry techniques and their applications [O] . Yu Niu, Gang Jin 2011

机译：基于成像椭圆仪技术的蛋白质微阵列生物传感器及其应用
7. Special Issue/Trends and Future of Corrosion Measurement Techniques. Modern Ellipsometry. Spectroscopic Ellipsometry and Infrared Ellipsometry. [O] . Tetsu GO, Katsuhisa SUGIMOTO 1994

机译：腐蚀测量技术的特殊问题/趋势和未来。现代椭圆形。光谱椭圆形和红外椭圆形测定法。
8. Ellipsometry Techniques and Their Application to Oxide Film Growth on Aluminum. [R] . mcdevitt,neil t. 1974

机译：椭圆测量技术及其在氧化铝薄膜生长中的应用。

The application of three-intensity measurement technique in ellipsometry

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