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Silicon carbide coating on UO{sub}2 pellet by a combustion reaction

机译:通过燃烧反应在UO {Sub} 2颗粒上的碳化硅涂层

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The coating of silicon carbide (SiC) and pyrolytic carbon (PyC) on a UO{sub}2 pellet was prepared by using a combustion reaction between carbon and silicon layers. The pyrolytic carbon and silicon were deposited by thermal decomposition of propane at 1250 °C in a chemical vapor deposition unit and microwave pulsed electron cyclotron resonance plasma chemical vapor deposition (PECVD) of silane at 500 °C was followed by a combustion reaction between the two layers. Microstructural observation of the layer with SEM showed that an inner layer existed following the surface contour of the pellet and an outer layer had a small amount of fine pores inside. Chemical analysis with EDX and AES revealed that the inner and outer layers were pyrolytic carbon and silicon carbide, respectively. From the TEM observation, the silicon carbide formed during the combustion reaction was fine crystalline beta-silicon carbide. Temperature distribution of the specimen during the combustion reaction was estimated by empirical and numerical methods.
机译:通过使用碳和硅层之间的燃烧反应制备UO {Sub} 2颗粒上的碳化硅(SiC)和热解碳(Pyc)的涂层。通过在1250℃下通过丙烷的热分解沉积热解碳和硅,在化学气相沉积单元中,在500℃下,硅烷的微波脉冲电子回火血浆化学气相沉积(PECVD)在两者之间进行燃烧反应层。与SEM的层的微观结构观察表明,在颗粒的表面轮廓和外层内部存在内层的内部具有少量的细孔。用EDX和AES的化学分析显示,内层和外层分别是热解碳和碳化硅。从TEM观察开始,在燃烧反应期间形成的碳化硅是细晶β-碳化硅的细碳化硅。通过经验和数值方法估算燃烧反应过程中试样的温度分布。

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