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COMPUTATIONAL SPECTRAL IMAGING IN CHROMATIC CONFOCAL METROLOGY

机译:彩色共焦计量中的计算光谱成像

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Chromatic confocal imaging (1, 2) is a non-contact single-point distance measuring technique that benefits from all the advantages offered by confocal imaging such as eliminating the out-of-focus ambient light originated from points on the object other than the one being imaged. Additionally, in contrast to conventional confocal microscopy, chromatic confocal imaging eliminates the need for a vertical scanning mechanism by use of chromatic coding. In a chromatic confocal probe, the objective lens of a confocal microscope is replaced by a dispersive lens and a spectrometer is placed behind the confocal pinhole. The wavelength at which the intensity output of the spectrometer peaks can be related to the height of the object at that point. Although due to chromatic coding no vertical scanning is required, but chromatic confocal imaging is a single-point measuring technique and lateral scanning of the probe across the surface of the object is still necessary.
机译:彩色共焦成像(1,2)是一种非接触式单点距离测量技术,其受益于共聚焦成像所提供的所有优点,例如消除福克焦的环境光起源于除一的物体之外的点正在成像。另外,与常规的共聚焦显微镜相比,彩色共焦成像通过使用色度编码消除了垂直扫描机构的需要。在彩色共焦探针中,共聚焦显微镜的物镜被分散镜头代替,并且光谱仪被放置在共焦针孔后面。光谱仪峰值的强度输出的波长可以与该点处对象的高度有关。虽然由于色度编码,但不需要垂直扫描,但是仍然需要晶体共聚焦成像是一种单点测量技术,并且仍然需要探针的探针。

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